Integrated Wafer Handling Systems
Vacuum Systems
Integrated Wafer Handling Systems
Vacuum Systems
FEATURES
OPTIONS
Cassette-to-Cassette Vacuum Transfer Systems
As Cassette-To-Cassette Vacuum Transfer Systems, the Constellation Systems integrate the reliability of Hine Vacuum Robotics and the latest system integration technology into a functional design with a small system footprint. The Constellation System can be customized to many process applications including Atomic Layer Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Metal and Oxide Etch, MR Head Deposition, MEMS, and compound semiconductor applications.
Brochure
† SEMI standard sizes up to 200mm. Other sizes are available upon request.
* Custom wafer cassettes upon request.
◊ CLP Slit Valve and Isolation Plumbing come standard with each cassette load port.
‡ Optional CLP Slit Valve and Isolation Plumbing available.
PRODUCT SPECIFICATIONS
Feature | HA-200 | HA-400/4300 /4450 | HA-500/5300/ | HA-600/6300/ 6450 | HA-800 |
Wafer Sizes Sides | Up to 200mm 4 | Up to 450mm 4 | Up to 450mm 5 | Up to 450mm 6 | Up to 200mm 8 |
Cassette Load Locks | 1 | 1 | 2 | 2 | 2 |
Wafers Per Cassette Transfer Height | 25 1100mm | ||||
Vacuum Performance Base Operating Pressure Leak Rate | < 5 x 10-7 Torr
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Input Power Maximum Temperature | 208 VAC 20A 1Ø 100°C | ||||
Interface | 200mm | 200mm | |||
MCBF MTTR | > 3 x 106 Cycles <2 hours | ||||
Control Interface | RS-232/Ethernet | ||||
