Vacuum Robotic Arms

Designed as the central handling robot for the Constellation Systems

Vacuum Robotic Arms

Designed as the central handling robot for the Constellation Systems

Vacuum Robotic Arms Components

Designed as the central handling robot for the Constellation Systems, Hine Vacuum Robotic Arms can be integrated with any vacuum transfer system. The HA-3.0 is the perfect fit for budget sensitive projects where no vertical travel is required. When substrate transfer with verified precision and repeatability within high vacuum environments is required, Hine HA-5.0 Vacuum Robotic Arm is the best solution.

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FEATURES

High reliability of > 3 million MCBF
2-axis or 3-axis motion control
Pay load up to 4.5kg
Standard and custom size arm segments
Standard and custom end effectors (single or dual)
Compact design including integrated controller
RS-232 / Ethernet control interface
CE/S2 compliant
HA-5.0V is the best replacement available for the Hine Design 4.5V
High vacuum compatible
Class 1 cleanroom compatible

OPTIONS

Arm Segments Sizes
Custom substrate sizes
Single and Dual End Effectors
Custom Payloads above 4.5kg.
Ethernet Communication
Teach Pendant (HA-5.0V only)

Brochure

PRODUCT SPECIFICATIONS

Specifications	HA-3.2	HA-5.0
Wafer Sizes	Up to 300mm
Maximum Payload	2.5Kg / 4.5Kg (standard / high load)
Mounting Configuration	Top
Axes of Motion	R, θ	R, θ, Z
“Z” Travel “Z” Repeatability Vertical Stroke	N/A	35mm ±0.05mm 35mm
Vacuum Performance · Base Operating Pressure · Leak Rate Vacuum Feedthroughs	<1 x 10-9 Torr Base Pressure <1 x 10-9 scc He/sec Coaxial Ferrofluidic Rotary Seal
Reach Repeatability Rotation θ Repeatability	±0.05mm ±0.05˚
Rotation	365 ˚ from “home” position
Weight	30 kg	35 kg
Power	24VDC @ 3.0 Amps
Temperature Limit	100°C Max
MCBF	>3 x 106 Cycles
Control Interface	RS-232 and Ethernet
Safety Features	Mechanical & Electrical Over travel