Atmospheric Aligners
Atmospheric Components Aligners
Atmospheric Aligners
Atmospheric Components Aligners
FEATURES
Hine Automations’ production proven Optical Aligners are designed to automatically recognize notches, flats and double flats on opaque and translucent wafers and provides ultra-precise wafer positioning for wafer from 2” up to 450mm. The Optical Aligner incorporates a laser micrometer and servo motor to profile the wafer edge determining the wafer center and position. Standard features include aligning thin and warped wafers, high precision wafer alignment and wafer-on-wafer alignments.
Using state of the art electronics and design the Optical Aligner offers fast and flexible configurations to meet the needs of various throughput requirements, while exceeding maintaining high repeatability, in ultra clean conditions. The Aligner operates by orienting the flat or notch of a wafer to a user defined rotational location and provide a correction vector to a robotic handler for alignment of the center of the wafer to the center of the handler.
Brochure
PRODUCT SPECIFICATIONS
Specifications | Atmospheric Aligner (HA-175A) |
Wafer Sizes | 75-300mm |
Rotational Travel | Unlimited |
Communications | RS-232 or Ethernet |
Wafer Center Alignment | ±0.10mm |
Angular Alignment | ±0.10° (Notch or Flat) |
Rotary Feedthrough | Ferro Fluidic |
Reliability | 3,000,000 MCBF |
Power | 24VDC @ 3.0 Amps |