Atmospheric Aligners

Atmospheric Components Aligners

Atmospheric Aligners

Atmospheric Components Aligners

Atmospheric-Aligners

FEATURES

  • High reliability of > 3 million MCBF

  • Translucent or opaque wafers

  • CE/S2 compliant

  • Available for wafer sizes from 75mm up to 300mm

  • Fiducial alignment and centering alignment – Delta Pick

  • RS-232 / Ethernet control interface

  • Vacuum Chuck (to hold wafer in place)

Automation-Gears

Hine Automations’ production proven Optical Aligners are designed to automatically recognize notches, flats and double flats on opaque and translucent wafers and provides ultra-precise wafer positioning for wafer from 2” up to 450mm.  The Optical Aligner incorporates a laser micrometer and servo motor to profile the wafer edge determining the wafer center and position.  Standard features include aligning thin and warped wafers, high precision wafer alignment and wafer-on-wafer alignments.

Using state of the art electronics and design the Optical Aligner offers fast and flexible configurations to meet the needs of various throughput requirements, while exceeding maintaining high repeatability, in ultra clean conditions.  The Aligner operates by orienting the flat or notch of a wafer to a user defined rotational location and provide a correction vector to a robotic handler for alignment of the center of the wafer to the center of the handler.

Brochure

Vacuum Aligners

PRODUCT SPECIFICATIONS

Specifications

Atmospheric Aligner (HA-175A)

Wafer Sizes

75-300mm 

Rotational Travel

Unlimited

Communications

RS-232 or Ethernet

Wafer Center Alignment

±0.10mm

Angular Alignment

±0.10° (Notch or Flat)

Rotary Feedthrough

Ferro Fluidic

Reliability

3,000,000 MCBF

Power

24VDC @ 3.0 Amps

Designs and Manufactures Vacuum Atmospheric Automation Systems and Robotic Components

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