Atmospheric Cassette Load Ports

Designed to provide cassette loading and unloading capabilities for the Constellation family of cluster systems our Atmospheric Cassette to Cassette Load Ports (ALP) can be customized to adapt to a customer’s specific requirements. The various Load Port configurations are built around the Hine Automation Atmospheric Elevators with material indexing and positional sensing capabilities.

The ALP-200 is an atmospheric load lock designed to transfer semiconductor substrates loaded in a cassette and become an advanced factory interface that links the wafer fabrication environment with the OEM cluster system. It features one atmospheric elevator, the HAtm-50, advanced material sensors, and safety interlocks. The ALP-200 includes sophisticated automation features such as wafer mapping and wafer cross-slot detection. The ALP-200 can interface with a wide variety of cluster systems and can be customized to fit your unique needs.

Full system integration requires only limited facilities connections and an Ethernet control interface. With a complete onboard control system, our Load Ports function as an intelligent material handling sub system