Wafer Handling Load Locks
Standard Load Locks
Wafer Handling Load Locks
Standard Load Locks
FEATURES
Customizable Options
Single Substrate Vacuum Transfer Systems
Hine’s Star Systems are automated load locks designed to eliminate the need to vent and evacuate the OEMs process chamber prior to every process cycle. Our Star Systems offer various levels of functionality and integration that meet technical and budgetary requirements of most OEM applications including Atomic Layer Deposition, Physical Vapor Deposition, Chemical Vapor Deposition, Metal and Oxide Etch, MR Head Deposition, MEMS, and compound semiconductor applications.
Brochure
† SEMI standard sizes available and custom end effectors available upon request.
‡ Measured as three standard deviations (3σ)
* End effector design may impact max payload capability
** Maximum reach measured from the edge of the slit valve
*** Vertical stroke is optional
SL-200/300/450 Available Configurations
(T) Telescoping | Offers telescoping drive rail with the ability to obtain standard reach requirements in a compact design. | ||
(MW) Multi-Wafer | Offers the ability to process multiple wafers using a single drive rail unit. | ||
(GB) Glove Box | Offers glove box mounting flange with easy access for operators and maintenance door. | ||
(HL) High Load | Offers the ability to process higher loads than standard unit due to the robust drive rail. (Often used for carriers rather than wafers.) | ||
PRODUCT SPECIFICATIONS
Feature | SL-200 | SL-300 | SL-450 |
Pressure Leak Rate | ≤ 1 x 10-3 Torr (with mechanical pump) ≤ 1 x 10-6 Torr (with high vacuum pump) ≤ 1 x 10-9 SCC He/Sec | ||
Reach* Standard Drive Chamber Reach* Extended Drive Chamber | 305mm beyond 50mm thick slit valve | 380mm beyond 60mm thick slit valve | 410mm beyond 60mm thick slit valve 610mm beyond 60mm thick slit valve |
Reach accuracy Placement accuracy | ± 0.12 mm ≤ ± 0.20mm @ Full Extension | ||
Payload* Droop* | 2.2Kg [5.0 Lbs.] ≤ 2.0mm (at full extension) | 2.2 Kg [5.0 Lbs.] ≤ 2.0mm (at full extension) | 5.4 Kg [12.0 Lbs.] ≤ 3.0mm (at full extension) |
Z-travel Z-accuracy Particle performance† | +20mm (measured at the bellows feedthrough) ±0.01mm (measured at the bellows feedthrough) <0.1 particle adders/cm2/Pass for particles of <0.5μm and <0.02 particle adders/cm2/Pass for particles of >1.0μm | ||
SL-200/300/450 Physical Specifications
Feature | SL-200 | SL-300 | SL-450 |
Main Chamber | 381mm x 340mm x 104mm | 432mm x 440mm x 104mm | 670mm x 622mm x 133mm |
Drive Chamber | 363mm x 122mm x 87mm | 432mm x 122mm x 91mm | 425mm x 184mm x 118mm 628mm x 184mm x 118mm (Extended**) |
Lid Dimensions | 368mm x 340mm x 35mm | 418mm x 440mm x 35mm | 650mm x 622mm x 36mm |
Chamber Volume | ~ 12 liters | ~ 16 liters | ~ 43 liters ~ 46 liters (Extended**) |
Weight | ~ 34 kilograms | ~ 42 kilograms | ~ 104 kilograms ~ 111 kilograms (Extended**) |
Interface | 200mm MESC (46mm x
236mm) | 300mm MESC (50mm x
336mm) | 450mm MESC (56mm x 496mm) |
