Vacuum Elevators

Vacuum Random Access Elevators

Vacuum Elevators

Vacuum Random Access Elevators

FEATURES

High reliability of > 3 million MCBF
Pay load up to 34kg
Compact design including integrated controller
RS-232 / Ethernet control interface
CE/S2 compliant
High vacuum compatible
Class 1 cleanroom compatible
Plug and Play upgrades for the Hine Design 48V and EMS 1248V elevator models

Vacuum Random Access Elevators with precise substrate indexing capabilities

With stainless steel bellows, brushless DC motor and proven design, Hine Vacuum Random Access Elevators provide precise substrate indexing capabilities within high vacuum environments. Robust undercarriages and precision guides allow our elevators to be integrated in applications requiring handling of heavy payloads.

Brochure

PRODUCT SPECIFICATIONS

	HA-50V	HA-51V
Wafer sizes	User-defined †
Payload Capacity	Up to 34kg*
Reliability MCBF	3+ M Cycles
Repeatability (Z-Axis)	± 0.05mm (0.004 in.) ‡
Input power	24 VDC +/-10% at 5 Amps
Maximum temperature	100°C Maximum
Control Interface	RS-232 / Ethernet control interface
CE/Semi2	Compliant
Vertical Motion (Z-Axis)	185mm (Standard)	305mm (Extended)
Product Weight (Elevator)	13kg (28 lbs.)	16kg (35 lbs.)

† Head plates for SEMI standard wafer sizes up to 200mm available.
* Higher payloads available upon request
‡ Measured as three standard deviations (3σ)