Atmospheric Vacuum Robotic Arms
Atmospheric robots are high-performance substrate handling solutions for semiconductor applications
Atmospheric Vacuum Robotic Arms
Atmospheric robots are high-performance substrate handling solutions for semiconductor applications
FEATURES
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Atmospheric robots high-performance substrate handling solutions
Hine atmospheric robots are high-performance substrate handling solutions for semiconductor applications. These SCARA type robots provide reliable and clean transfer mechanism for atmospheric front ends. Hine atmospheric robots transfer a wide variety of substrates including SEMI standard wafers, reticles and masks.
Brochure
* Hine Automation offers end effectors for SEMI standard sizes up to 200mm.
Other sizes are available upon request.
† Payload with standard configuration
‡ Up from the Home Position
** Counter Clockwise from the Home Position
†† from center (wrist position with 140mm standard arms)
‡‡ Measured as three standard deviations (3σ)
PRODUCT SPECIFICATIONS
HAtm-4.0 | Both | HAtm-5.0 | |
Z‐Travel | 10mm Up from the Home Position | 184mm Up from the Home Position | |
Rotational Travel | 365° CW from the Home Position | ||
Reach | 329mm from Home Position | 465mm from center | |
Z‐Repeatability | ±0.05mm (measured at the wrist) | ±0.03mm (measured at the wrist) | |
Reach Repeatability | ±0.1mm (measured at the wrist) | ±0.03mm (measured at the wrist) | |
Rotational Repeatability | ±0.01° (measured at the wrist) | ||
Z‐Speed | ±450mm/s | ||
Reach Speed | ±1000mm/s | ||
Rotational Speed | ±360°/s | ||
Maximum Payload | 0.5 Kg (standard configuration) | ||
Power | 24VDC @ 3.0 Amps | 24VDC @ 7.0 Amps | |
Weight | 5 Kg | 14 Kg | |
MCBF | > 1.5 x 107 Cycles | ||
Stations Available | 60 | ||
Position Teaching | Teach Utility Included | ||
Control Interface | Digital, RS‐232 and Ethernet | Digital, RS-232 & Ethernet |
