Vacuum Cassette Load Ports

CLP – Vacuum Cassette to Cassette Load Port for 25 & 50 wafer cassette

MLP-Vacuum-Mini-Load-Port-for-Single-wafer-up-to-4-wafer-cassette

MLP – Vacuum Mini Load Port for Single wafer up to a 4-wafer cassette

MLP / CLP FEATURES

Hine Robotics: HA-50V Vacuum or HAtm-5.0 Atmospheric Elevator
High reliability of > 3 million MCBF
Handles wafer sizes up to 200mm
Safety interlocks
High Vacuum Capability
RS-232 / Ethernet Control Interface

MLP-200 / MLP-300 OPTIONS

Vacuum gas plumbing
1-4 wafer cassettes
Slit Valve or Valve door

CLP-200/300 SPECIFIC FEATURES

High Through-put
“Plug & Play” Vacuum Transport System
Wafer & Cassette Sensors for System Readiness
Reduced System Footprint
Universal Head Plate
Sophisticated automation features including wafer mapping, wafer cross- slot detection

CLP-200/300 OPTIONS

Dual Wafer Mapping Sensors
Multiple View ports on side and door of CLP
Wafer Cassette on Tilt-Out Cassette Cradle Assembly
Slit Valve or Valve door

Vacuum and Atmospheric Cassette Load Ports

Designed to provide cassette loading and unloading capabilities for the Constellation family of cluster systems our Vacuum Cassette to Cassette Load Ports (CLP) can be customized to adapt to a customer’s specific requirements. The various Load Port configurations are built around the Hine Automation Vacuum Elevators with material indexing and positional sensing capabilities.

The Vacuum Mini Load Port (MLP) is designed as a single and multi-wafer Load Port to provide loading and unloading capabilities for Hine’s Integrated Wafer Handling Systems. The MLP configuration is cost-effective solution for application where a full Cassette is not required. The MLP also includes a self-centering design for the cassette and wafer, eliminating the need for a positional alignment device.

Full system integration requires only limited facilities connections and an Ethernet control interface. With a complete onboard control system, our Load Ports function as an intelligent material handling sub system.

Brochure

PRODUCT SPECIFICATIONS

Specifications	Mini-Load Port (MLP)	Manual Door CLP	Autodoor CLP
Wafer Sizes	≤ 200mm 300mm (for MLP-300 only)	≤200mm 300mm (for CLP-300 only)
Door Open/Close Time	N/A		16 seconds
Air Pressure (Autodoor)	N/A
Mapping Time	N/A	20 seconds
Payload Capacity	Up to 34kg
Base Operating Pressure	<5.00 E-6 Torr
Leak Rate	<2.0 x 10-8 scc He/sec
Total Weight	~110Kgs (240 lbs.)
Reliability	N/A	3,000,000 MCBF