Hine Automation Develops Customized Solution for a Leading Supplier of Atomic Layer Deposition (ALD) Equipment and Thin Film Coating Services

Hine Automation Develops Customized Solution for a Leading Supplier of Atomic Layer Deposition (ALD) Equipment and Thin Film Coating Services

Hine Automation’s reputation for quality and versatility in design and manufacturing continues to prove what sets Hine apart among its competitors. Each customer has a set of goals, pain points, and other daily challenges. Hine’s custom engineering delivers innovative components and high-end specialized solutions to streamline the clients’ processes and increase product performance, helping them reach their goals and overcome their obstacles.

CHALLENGE

Custom Engineering to Address Size and Weight Restrictions

A leading supplier of Atomic Layer Deposition (ALD) equipment and thin film coating services, contracted Hine to develop a Low-Price Batch Loader to interface with their new platform. Their need focused on expanding the capability of their existing tool, currently only capable of handling 200mm wafers. In addition, the solution required an interface with a new platform (Prodigy) for use in MEMS and Compound Semi ALD processing of 300mm substrates.

SOLUTION

A Collaborative Approach to Provide Applicable Design Solutions

Unlike off-the-shelf solution providers, Hine worked directly with their client to understand the challenge. Hine’s experienced engineering team then created a solution to optimize performance and increase the client’s overall efficiencies.

However, the right solution only comes when the teams collaborate and work together with complete transparency. Hine’s engineering experience and ability to listen to the customer’s needs and then apply realistic design goals contributed to the success of this project.

As a custom solution, Hine developed the SL-1300 to transfer an entire wafer cassette into a process chamber, improving upon the client’s current design which transferred only a single wafer. In addition, the client required a weight restriction of 12 pounds, and requested the side-hinged access door be universal with the capability to be mounted on any side of the transfer module.  Hine’s SL-1300 met or exceeded all of the client’s specifications.

Hine SL-1300

The SL-1300 Automated Load Lock loads and unloads a substrate cassette with up to 300mm diameter substrates into a process reactor through a standard vacuum gate valve.

Features

• Reliable and Safe
• Ease of Operation
• Accessibility
• Safety Interlock
• Wafer/Cassette Sensors
• High Throughput with Batch Processing
• Fold-Down Door with Gas Spring Assist
• Universal Access Door

The client’s customized solution succeeded because the teams collaborated and worked together with complete transparency. Of course, the engineering team’s experience is important, but listening to the customers’ needs and connecting them to realistic goals proved critical to a successful outcome.

Benefits of Custom Engineering

• Collaboration Leads to Better Design
• Improved User Experience
• Better Resource Management
• Cost Reduction
• Quality Control
• Faster Time to Market

FINAL THOUGHTS

Ability to Create Custom, Small Batch Solutions—a Key Differentiator

Customer insight, flexibility, and collaboration have proven essential factors in the success of any custom engineering process. Hine’s extensive experience working with some of the most creative and innovative engineers and its ability to take a customer’s idea from concept to completion enabled their client to focus on its core competencies and create new opportunities for its customers.

For more information on Automated Load Locks, visit our website: https://hineautomation.com/.