Vacuum Aligners
High vacuum environment Aligners
Vacuum Aligners
High vacuum environment Aligners
FEATURES
High vacuum environment aligners
Our aligners offer a precise and reliable alignment solution for opaque and transparent substrates within high vacuum environments. Ferro fluidic seals, precision DC motors, advanced CCD Array, and sophisticated software are integrated into a state-of-the-art, compact design for semiconductor and compound semiconductor substrates. Although our Aligners are designed to work with Hine Robotic Arms, they may be integrated into systems with a robotic arm able to execute Delta Picks.
Brochure
PRODUCT SPECIFICATIONS
HA-71 | HA-75 | HA-75C/HA-76 | |
Wafer Sizes | 100-200 mm | ||
Wafer Types | Opaque and Transparent | ||
Mounting Facet | 200mm or 300mm Facet | N/A | |
Aligner Enclosure Size | 200mm or 300mm | Integrated Aligner | |
Axes of Motion | θ | ||
Vacuum Performance Base operating pressure Leak Rate | <5.00E-09 Torr 1.00E-09 scc He/sec | ||
Input Power | 24V DC at 2.0 Amps | ||
Maximum Temperature | 300⁰C | ||
Exposed Materials | 6061-T6 Aluminum, Stainless Steel 300 and 400 Series, | ||
Control Interface | RS-232 / Ethernet | ||
MCBF | >3.00E+06 | ||
CE | Compliant | ||
SEMI | Compliant | ||
Repeatability 0 Centering | Measured as three standard deviations (3σ). 0.03⁰ | 0.01⁰ <0.10mm | < 0.051 mm (3σ) | ||
Calibration Wafer | Included | ||
